Novel Processes for Poly-Si Thin-Film Transistors on Plastic Substrates
نویسنده
چکیده
Novel Processes for Poly-Si Thin-Film Transistors on Plastic Substrates
منابع مشابه
P-24: High-Temperature (250°C) Amorphous-Silicon TFT’s On Clear Plastic Substrates
Amorphous silicon (a-Si) thin film transistors (TFT’s) were fabricated on free-standing, clear plastic substrates with a maximum process temperature of up to 250°C. An a-Si TFT backplane for active matrix OLED (AMOLED) application was also made on such substrates. The performance of both the TFT’s and the AMOLED backplane are excellent. These results will enable the fabrication of flexible AMLC...
متن کاملLow Temperature Polysilicon Thin-Film Transistors on Flexible Substrates
We fabricated low-temperature polycrystalline silicon thin-film transistors (poly-Si TFTs) on flexible substrates using sputtered amorphous Si (a-Si) precursor films. The a-Si precursor films were deposited by using rf-magnetron sputtering system with argon-helium mixture gas to minimize the argon incorporation into the Si film. The a-Si films were laser annealed by using XeCl excimer laser and...
متن کاملA Novel Selected Area Laser Assisted (SALA) System for Crystallization and Doping Processes in Low-Temperature Poly-Si Thin-Film Transistors
CMOS poly-Si thin-film transistors (TFTs) were fabricated through crystallization and GILD processes by a novel selected area laser assisted (SALA) system. The system enables a local area irradiation of small beams of a pulsed solid-state laser of frequency tripled Nd:YAG. The novel TFT process eliminated 3 doping mask steps of the conventional process. On-off current ratios for both types of p...
متن کاملAmorphous-silicon thin-film transistors made at 280°C on clear-plastic substrates by interfacial stress engineering
Ke Long I-Chun Cheng Alexis Kattamis Helena Gleskova Sigurd Wagner James C. Sturm Abstract — A process temperature of ~300°C produces amorphous-silicon (a-Si) thin-film transistors (TFTs) with the best performance and long-term stability. Clear organic polymers (plastics) are the most versatile substrate materials for flexible displays. However, clear plastics with a glass-transition temperatur...
متن کاملOrganic Thin Film Field-effect Transistors (otfts) Are Organic Thin Film Transistors
particularly interesting as their fabrication processes are much less complex compared with conventional Si technology, which involves high-temperature and high-vacuum deposition processes and sophisticated photolithographic patterning methods. In general, low-temperature deposition and solution processing can replace the more complicated processes involved in conventional Si technology. In add...
متن کامل